Mesoscale Wide-Bandwidth Linear Magnetic Actuators: An LDRD Final Report

As MEMS transducers are scaled up in size, the threshold is quickly crossed to where magnetoquasistatic (MQS) transducers are superior for force production compared to electroquasistatic (EQS) transducers. Considerable progress has been made increasing the force output of MEMS EQS transducers, but progress with MEMS MQS transducers has been more modest. A key reason for this has been the difficulty implementing efficient lithographically-fabricated magnetic coil structures. The contribution of this study is a planar multilayer polyphase coil architecture which provides for the lithographic implementation of efficient stator windings suitable for linear magnetic machines. A millimeter-scale linear actuator with complex stator windings was fabricated using this architecture. The stators of the actuator were fabricated using a BCB/Cu process, which does not require replanarization of the wafer between layers. The prototype stator was limited to thin copper layers (3 μm) due to the use of evaporated metal at the time of fabrication. Two layers of metal were implemented in the prototype, but the winding architecture naturally supports additional metal layer pairs. It was found in laboratory tests that the windings can support very high current densities of 4 × 10A/m without damage. Force production normal to the stator was calculated to be 0.54 N/A. For thin stators such as this one, force production increases approximately linearly with the thickness of the windings and a six-layer stator fabricated using a newly implemented electroplated BCB/Cu process (six layers of 15 μm thick metal) is projected to produce approximately 8.8 N/A.